Gerardi, G.J. ; Rong, F.C. ; Poindexter, E.H. ; Harmatz, M. ; Shen, H. ; Warren, W.L.
出版情報:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.601-606, 1993. Pittsburgh, Pa.. Materials Research Society
Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium. pp.120-127, 1999. Pennington, New Jersey. Electrochemical Society
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.172-183, 1996. Pennington, NJ. Electrochemical Society
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