Yamagishi, H. ; Fusegawa, I. ; Takano, K. ; Iino, E. ; Fujimaki, N. ; Ohta, T. ; Sakurada, M.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.124-135, 1994. Pennington, NJ. Electrochemical Society
Iino, E. ; Takano, K. ; Fusegawa, I. ; Yamagishi, H.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.148-155, 1994. Pennington, NJ. Electrochemical Society
Fusegawa, I. ; Iino, E. ; Hirohata, T. ; Yamagishi, H.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.683-688, 1992. Pittsburgh, Pa.. Materials Research Society
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