Usami, A. ; Fujiwara, H. ; Nakai, T. ; Matsuki, K. ; Takeuchi, T. ; Wada, T.
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.261-268, 1992. Pittsburgh, Pa.. Materials Research Society
Usami, A. ; Nakai, T. ; Fujiwara, H. ; Ishigami, S. ; Wada, T. ; Matsuki, K ; Takeuchi, T.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.295-300, 1992. Pittsburgh, Pa.. Materials Research Society
Usami, A. ; Shiraki, H. ; Fujiwara, H. ; Abe, R. ; Osamura, N. ; Ichimura, M. ; Wada, T.
出版情報:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.215-222, 1991. Pittsburgh, Pa.. Materials Research Society