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A Study of Defects in SiO2 Films on Si by Variable-Energy Positron Annihilation Spectroscopy

著者名:
掲載資料名:
Positron annihilation : ICPA-10 : Proceedings of the 10th International Conference on Positron Annihilation, May 23-29, 1994, Beijing, China
シリーズ名:
Materials science forum
シリーズ巻号:
175-178
発行年:
1995
巻:
Part1
開始ページ:
157
終了ページ:
160
出版情報:
Aederlmannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496860 [0878496866]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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