Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Chow, Y.F. ; Foo, T.H. ; Shen, L. ; Pan, J.S. ; Du, A. Y. ; Xing, Z.X. ; Yuan, Y.J. ; Li, C.Y. ; Kumar, R. ; Foo, P.D.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.563-568, 2002. Warrendale. Materials Research Society
Prasad, K. ; Yuan, X.L. ; Tan, C.M. ; Zhang, D.H. ; Li, C. Y. ; Wang, S.R. ; Yuan, S.Y.J. ; Xie, J.L. ; Gui, D. ; Foo, P.D.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.395-400, 2002. Warrendale. Materials Research Society
Loh, S.W. ; Zhang, D.H. ; Li, C.Y. ; Liu, R. ; Wee, A.T.S. ; Foo, P.D. ; Xie, Joseph ; Prasad, K. ; Tan, C.M. ; Lee, Y.K.
出版情報:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.116-122, 2001. Pennington, N.J.. Electrochemical Society
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.123-130, 2001. Pennington, N.J.. Electrochemical Society