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出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.935-948, 2006. Stafa-Zuerich. Trans Tech Publications
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.291-307, 2003. Pennington, N.J.. Electrochemical Society
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.395-404, 1994. Pennington, NJ. Electrochemical Society
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.87-98, 2005. Pennington, N.J.. Electrochemical Society
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出版情報:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.383-388, 2005. Pennington, N.J.. Electrochemical Society
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.267-278, 2005. Pennington, N.J.. Electrochemical Society
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.493-498, 2003. Pennington, N.J.. Electrochemical Society