Pelaz, L. ; Gilmer, G. H. ; Jaraiz, M. ; Gossmann, H-J. ; Rafferty, C. S. ; Eaglesham, D. J. ; Poate, J. M.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.341-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Venezia, V. C. ; Haynes, T. E. ; Agarwal, A. ; Gossmann, H-J. ; Eaglesham, D. J.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.303-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.3-, 1999. Warrendale, PA. MRS - Materials Research Society