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Energetic Ion Beams in Semiconductor Processing: Summary of a DOE Panel Study

著者名:
Picraux, S. T.
Chason, E.
Poate, J. M.
Borland, J. O.
Current, M. I.
Rubia, T. Diaz de la
Eaglesham, D. J.
Holland, O. W.
Law, M. E.
Magee, C. W.
Mayer, J. W.
Melngailis, J.
Tasch, A. F.
さらに 8 件
掲載資料名:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
396
発行年:
1996
開始ページ:
859
出版情報:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
言語:
英語
請求記号:
M23500/396
資料種別:
国際会議録

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