Pelaz, L. ; Gilmer, G. H. ; Jaraiz, M. ; Gossmann, H-J. ; Rafferty, C. S. ; Eaglesham, D. J. ; Poate, J. M.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.341-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Gossmann, H. J. ; Rafferty, C. S. ; Stolk, P. A. ; Eaglesham, D. J. ; Gilmer, G. H. ; Poate, J. M. ; Vuong, H.-H. ; Mogi, T. K. ; Thompson, M. O.
出版情報:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.3-, 1995. Pittsburgh. MRS - Materials Research Society