ECR PLASMA ENHANCED MOCVD OF TITANIUM NITRIDE
- 著者名:
Gross, M. E. Weber, A. Nikulski, R. Klages, C. -P. Charatan, R. M. Brown, W. L. Dons, E. Eaglesham, D. J. - 掲載資料名:
- Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 334
- 発行年:
- 1994
- 開始ページ:
- 323
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992337 [1558992332]
- 言語:
- 英語
- 請求記号:
- M23500/334
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |