Libertino, S. ; Benton, J. L. ; Coffa, S. ; Jacobson, D. C. ; Eaglesham, D. J. ; Poate, J. M. ; Lavalle, M. ; Fuochi, P. G.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.187-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Benton, J. L. ; Libertino, S. ; Coffa, S. ; Eaglesham, D. J.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.193-, 1997. Pittsburg, Pa.. MRS - Materials Research Society