1.

国際会議録
国際会議録
1. Patterning of diamond films by RIE and its MEMS applications
Ding,G. ; Yao,J. ; Yu,A. ; Zhao,X. ; Wang,L. ; Shen,T.
出版情報: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.451-461,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4174
2.

国際会議録
国際会議録
2. Orthogonal method for processing of SU-8 resist in UV-LIGA
Liu,J. ; Zhu,J. ; Ding,G. ; Zhao,X. ; Cai,B.
出版情報: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.462-466,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4557
3.

国際会議録
国際会議録
3. Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
Ding,G. ; Yu,A. ; Zhao,X. ; Xu,D. ; Cai,B. ; Shen,T.
出版情報: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.340-345,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3892
4.

国際会議録
国際会議録
4. DEM technique:a new three-dimensional microfabrication technique for nonsilicon materials
Chen,D. ; Zhang,D. ; Ding,G. ; Zhao,X. ; Zhang,J. ; Yang,C. ; Cai,B.
出版情報: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.1099-1104,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3680
5.

国際会議録
国際会議録
5. CVD diamond microhinge for MOEMS applications
Ding,G. ; Zhao,X. ; Yao,X. ; Shen,T.
出版情報: Instruments for optics and optoelectronic inspection and control, 8-10 November 2000, Beijing, China.  pp.61-64,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4223
6.

国際会議録
国際会議録
6. Novel micropump actuated by thin film shape memory alloy
Xu,D. ; Cai,B. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Wang,L. ; Zhao,X.
出版情報: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.369-375,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3891
7.

国際会議録
国際会議録
7. Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter
Zhao,X. ; Yang,C. ; Ding,G. ; Zhang,M.
出版情報: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.352-358,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3891