1.

国際会議録
国際会議録
1. Patterning of diamond films by RIE and its MEMS applications
Ding,G. ; Yao,J. ; Yu,A. ; Zhao,X. ; Wang,L. ; Shen,T.
出版情報: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.451-461,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4174
2.

国際会議録
国際会議録
2. Dynamic actuation behavior of NiTi/Si diaphragm micropump
Xu,D. ; Wang,L. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Cheng,X. ; Chen,J. ; Cai,B.
出版情報: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.324-330,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4174
3.

国際会議録
国際会議録
3. Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
Ding,G. ; Yu,A. ; Zhao,X. ; Xu,D. ; Cai,B. ; Shen,T.
出版情報: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.340-345,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3892
4.

国際会議録
国際会議録
4. PMMA deep etching by O2RIE
Yu,A. ; Ding,G. ; Guo,X. ; Li,C. ; Mao,H. ; Ni,Z.
出版情報: Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings.  pp.852-855,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4086
5.

国際会議録
国際会議録
5. Novel micropump actuated by thin film shape memory alloy
Xu,D. ; Cai,B. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Wang,L. ; Zhao,X.
出版情報: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.369-375,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3891