Musca, C.A. ; Nguyen, T. ; Antoszewski, J. ; Redfern, D.A. ; Dell, J.M. ; Faraone, L.
出版情報:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.314-321, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Dell, J.M. ; Nguyen, T. ; Musca, C.A. ; Antoszewski, J. ; Faraone, L. ; Pal, R.
出版情報:
Progress in semiconductors II : electronic and optoelectronic applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.. pp.595-606, 2003. Warrendale, Pa.. Materials Research Society
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