Umana-Membreno, G.A. ; Dell, J.M. ; Parish, G. ; Faraone, L. ; Mishra, U.K.
出版情報:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.220-227, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering