All optically driven MEMS deformable device via a photodetector array [6368-04]
- 著者名:
Khoury, J. Vaccaro, K. Woods, C. L. ( Air Force Lab. (USA) ) Haji-saeed, B. ( Univ. of Massachusetts, Lowell (USA) ) Sengupta,S. K. ( Univ. of Massachusetts, Lowell (USA) and Solid State Scientific Corp (USA) ) Armiento, C. Goodhue, W. D. ( Univ. of Massachusetts, Lowell (USA) ) Kierstead, J. Davis, A. ( Solid State Scientific Corp. (USA) ) Clark, W. ( Anteon Corp. (USA) ) - 掲載資料名:
- Optoelectronic Devices: Physics, Fabrication, and Application III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6368
- 発行年:
- 2006
- 開始ページ:
- 636804
- 終了ページ:
- 636904
- 総ページ数:
- 101
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464668 [081946466X]
- 言語:
- 英語
- 請求記号:
- P63600/6368
- 資料種別:
- 国際会議録
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8
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