Mahorowala, A. ; Halle, S. ; Gabor, A. ; Chu, W. ; Barberet, A. ; Samuels, D. ; Abdo, A. ; Tsou, L. ; Yan, W. ; Iseda, S. ; Patel K ; Dirahoui, B ; Nomura, A ; Ahsan, I ; Azam, F ; Berg, G ; Brendler, A ; Zimmerman, J ; Faure, T
出版情報:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Tsagarakis, E. ; Chu, W. ; Meizing, L. ; Weppner, W.
出版情報:
Solid-State Ionic Devices II, ceramic sensors : proceedings of the International Symposium. pp.270-284, 2000. Pennington, N.J.. Electrochemical Society
Natural gas conversion V : proceedings of the 5th International Natural Gas Conversion Symposium, Giardini Naxos-Taormina, Italy, September 20-25, 1998. pp.855-, 1998. Amsterdam. Elsevier
Chu, W. ; Yan, Q. ; Li, Q. ; Liu, X. ; Yu, Z. ; Xiong, G.
出版情報:
Natural gas conversion V : proceedings of the 5th International Natural Gas Conversion Symposium, Giardini Naxos-Taormina, Italy, September 20-25, 1998. pp.849-, 1998. Amsterdam. Elsevier
Schattenburg, M. L. ; Carter, J. ; Chu, W. ; Fleming, R. C. ; Ghanbari, R. A. ; Mondol, M. ; Polce, N. ; Smith, Henry I.
出版情報:
Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.63-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Dobisz, E. A. ; Peckerar, M. C. ; Chu, W. ; Rhee, K. ; Shirey, L. S. ; Marrian, C. R. K. ; Salvino, R. E. ; Foster, K. ; Kosokowski, J.
出版情報:
Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.3-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Long, Y. ; Chu, W. ; Ye, Y. -H. ; Zhang, X. -W. ; Dai, X. -Y.
出版情報:
Natural gas conversion VII : proceedings of the 7th Natural Gas Conversion Symposium, June 6-10, 2004, Dalian, China. pp.613-618, 2004. Amsterdam. Elsevier
Nanotechnology in mesostructured materials : proceedings of the 3rd International Mesostructured Materials Symposium, Jeju, Korea, July 8-11, 2002. pp.231-234, 2003. Amsterdam. Elsevier
Ferrari, M. ; Chu, W. ; Desai, T. ; Hansford, D. ; Mazzoni, G. ; Huen, T. ; Zhang, M.
出版情報:
Thin films and surfaces for bioactivity and biomedical applications : symposium held November 28-29, 1995, Boston, Massachussetts, U.S.A.. pp.101-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. pp.61504S-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Zhao, X. ; Fu, J. ; Chu, W. ; Nguyen, C. ; Vorburger, T.V.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.363-373, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XI. pp.776-783, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chu, W. ; Radens, C. ; Dirchoui. B. ; Samuels, D. ; Credendino, S. ; Nomura, A. ; Cornell, R.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61520Y-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering