Weldon, M.K. ; Marsico, V.E. ; Chabal, Y.J. ; Agarwal, A. ; Eaglesham, D.J. ; Sapjeta, J. ; Brown, W.L. ; Jacobson, D.C. ; Caudano, Y. ; Christman, S.B. ; Chaban, E.E.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.229-248, 1997. Pennington, NJ. Electrochemical Society
Caudano, Y. ; Weldon, M.K. ; Chabal, Y.J. ; Stefanov, B.B. ; Raghavachari, K. ; Jacobson, D.C. ; Christman, S.B. ; Chaban, E.E.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.365-372, 1997. Pennington, NJ. Electrochemical Society