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MEMS optical switch control and integrated packaging

著者名:
Cai, H. ( Institute for Infocomm Research (Singapore) )
Chan, C.W. ( Nanyang Technological Univ. (Singapore) )
Wang, Y.X. ( Institute for Infocomm Research (Singapore) )
Lu, C. ( Institute for Infocomm Research (Singapore) )
Asundi, A.K. ( Nanyang Technological Univ. (Singapore) )
Liu, A.Q. ( Nanyang Technological Univ. (Singapore) )
さらに 1 件
掲載資料名:
Microsystems Engineering: Metrology and Inspection III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5145
発行年:
2003
開始ページ:
62
終了ページ:
68
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450159 [0819450154]
言語:
英語
請求記号:
P63600/5145
資料種別:
国際会議録

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