Yuan, Z. ; Cheng, X. ; Xu, D. ; Ye, Z. ; Zhang, Y. ; Cai, B.
出版情報:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China. pp.196-199, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Cheng, X. ; Xu, D. ; Chen, J. ; Cai, B. ; Ding, G.
出版情報:
Micromachining and Microfabrication Process Technology and Devices. pp.147-152, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chen, J. ; Cai, B. ; Wang, L. ; Xu, D. ; Cheng, X.
出版情報:
Micromachining and Microfabrication Process Technology and Devices. pp.298-305, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Cheng, X. ; Xu, D. ; Cai, B. ; Wang, L. ; Chen, J. ; Li, G. ; Xu, S.
出版情報:
Micromachining and Microfabrication Process Technology and Devices. pp.340-345, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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