Reduction of the C54-TiSi2 Phase Formation Temperature Using Metallic Impurities
- 著者名:
Mann, R. W. Clevenger, L. A. Miles, G. L. Harper, J. M. E. Cabral, C., Jr d'Heurle, F. M. Knotts, T. A. Rakowski, D. W. - 掲載資料名:
- Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 402
- 発行年:
- 1996
- 開始ページ:
- 95
- 出版情報:
- Pittsburgh: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993051 [1558993053]
- 言語:
- 英語
- 請求記号:
- M23500/402
- 資料種別:
- 国際会議録
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