Libertino, S. ; Benton, J. L. ; Coffa, S. ; Jacobson, D. C. ; Eaglesham, D. J. ; Poate, J. M. ; Lavalle, M. ; Fuochi, P. G.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.187-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Saito, S. ; Hamada, K. ; Eaglesham, D. J. ; Shiramizu, Y. ; Benton, J. L. ; Kitajima, H. ; Jacobson, S. D. C. ; Poate, J. M.
出版情報:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.81-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Saito, S. ; Hamada, K. ; Eaglesham, D. J. ; Shiramizu, Y. ; Benton, J. L. ; Kitajima, H. ; Jacobson, S. D. C. ; Poate, J. M.
出版情報:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.141-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society