1.

国際会議録
国際会議録
1. REMOTE PLASMA CLEANING AND ION-INDUCED HYDROGEN DESORPTION FROM THE SILICON (100) SURFACE AND ITS APPLICATIONS TO Si EPITAXY
Kinosky, David S. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.
出版情報: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.831-836,  1993.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 279
2.

国際会議録
国際会議録
2. THE DEPENDENCE OF DEFECT DENSITY IN GeXSi1-X/Si HETEROSTRUCTURES GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION ON DEPOSITION PARAMETERS
Kinosky, D. ; Qian, R. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Magee, C. ; Grove, C. L.
出版情報: Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A..  pp.445-450,  1992.  Pittsburgh, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 263
3.

国際会議録
国際会議録
3. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF Ge Si1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.
出版情報: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.353-360,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 236
4.

国際会議録
国際会議録
4. HETEROEPITAXY OF Si/Si1-xGex GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Anthony, B. ; Banerjee, S. ; Tasch, A. ; Magee, C.
出版情報: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.223-228,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 223
5.

国際会議録
国際会議録
5. RHEED OBSERVATIONS OF SILICON (100) SURFACE RECONSTRUCTION AFTER REMOTE HYDROGEN PLASMA CLEANING
Hsu, T. ; Breaux, L. ; Anthony, B. ; Banerjee, S. ; Tasch, A.
出版情報: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.161-166,  1989.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 146
6.

国際会議録
国際会議録
6. *REACTION KINETICS OF EPITAXIAL SILICON DEPOSITION AT 200-400o USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Anthony, B. ; Hsu, T. ; Breaux, L. ; Banerjee, S. ; Tasch, A.
出版情報: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.145-150,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 165
7.

国際会議録
国際会議録
7. REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF EPITAXIAL SILICON ON SILICON (100) AT 150oC
Hsu, T. ; Anthony, B. ; Breaux, L. ; Banerjee, S. ; Tasch, A.
出版情報: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.139-144,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 165
8.

国際会議録
国際会議録
8. GROWTH OF Ge-ON-Si STRUCTURES USING REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Qian, Rong Z. ; Kinosky, D. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.
出版情報: Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.421-426,  1993.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 281
9.

国際会議録
国際会議録
9. *IN SITU LOW TEMPERATURE CLEANING AND PASSIVATION OF SILICON BY REMOTE HYDROGEN PLASMA FOR SILICON-BASED EPITAXY
Banerjee, S. ; Tasch, A. ; Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Mahajan, A. ; Thomas, S.
出版情報: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.43-54,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 259
10.

国際会議録
国際会議録
10. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF GexSi1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.
出版情報: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.811-818,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 235