Ichikawa, F. ; Nagatomo, Y. ; Katakura, Y. ; Itoh, S. ; Matsuhashi, H. ; Hirashita, N. ; Baba, S.
出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.123-132, 2003. Pennington, N.J.. Electrochemical Society