1.

国際会議録
国際会議録
1. Ultrahigh-gain Ni-like Kr soft x-ray laser by optical field ionization-initiated transient collisional excitation scheme
Maya,O. ; Nagata,Y. ; Obara,M. ; Aoyagi,Y. ; Midorikawa,K.
出版情報: Soft X-ray lasers and applications III : 19-20 July 1999, Denver, Colorado.  pp.143-150,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3776
2.

国際会議録
国際会議録
2. F2 laser ablation of GaN
Akane,T. ; Sugioka,K. ; Nomura,S. ; Hammura,K. ; Obata,K. ; Aoki,N. ; Toyoda,K. ; Aoyagi,Y. ; Midorikawa,K.
出版情報: First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan.  pp.70-72,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4088
3.

国際会議録
国際会議録
3. GaN etching by simultaneous irradiation of KrF excimer laser and F2 laser
Akane,T. ; Sugioka,K. ; Obata,K. ; Nomura,S. ; Hammura,K. ; Aoki,N. ; Toyoda,K. ; Aoyagi,Y. ; Midorikawa,K.
出版情報: Laser Applications in Microelectronic and Optoelectronic Manufacturing VI.  pp.133-140,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4274