1.

国際会議録
国際会議録
1. Etching and surface smoothing with gas-cluster ion beams
Fenner, D. B. ; Torti, R. P. ; Allen, L. P. ; Toyoda, N. ; Kirkpatrick, A. R. ; Greer, J. A. ; DiFilippo, V. ; Hautala, J.
出版情報: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.27-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 585
2.

国際会議録
国際会議録
2. Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams
Toyoda, N. ; Lee, K. K. ; Luan, H-C. ; Lim, D. R. ; Agarwal, A. M. ; Wada, K. ; Kimerling, L. C. ; Allen, L. P. ; Fenner, D. B. ; Kirkpatrick A. R.
出版情報: Thin films for optical waveguide devices and materials for optical limiting : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.51-,  2000.  Warrendale, PA.  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 597
3.

国際会議録
国際会議録
3. Roughness Analysis of Ion Beam Processed GaSb and InSb Surfaces
Krishnaswami, K. ; Fenner, D. B. ; Vangala, S. R. ; Santeufemio, C. ; Grzesik, M. ; Allen, L. P. ; Dallas, G. ; Goodhue, W. D.
出版情報: Progress in compound semiconductor materials -- electronic and optoelectronic applications.  pp.273-278,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 829