Madakson, P. ; Clark, G. J. ; Legoues, F. K. ; d'Heurle, F. M. ; Baglin, J. E. E.
出版情報:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.281-286, 1988. Pittsburgh, Pa.. Materials Research Society
Coia, C. ; Lavoie, C. ; d'Heurle, F. M. ; Desjardins, P. ; Detavernier, C. ; Kellock, A. J. (Invited Paper)
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.585-596, 2005. Pennington, NJ. Electrochemical Society
Barmak, K. ; Clevenger, L. A. ; Agnello, P. D. ; Ganin, E. ; Copel, M. ; Dehaven, P. ; Falta, J. ; d'Heurle, F. M. ; Cabral Jr., C.
出版情報:
Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.575-580, 1992. Pittsburgh. Materials Research Society
Hellberg, P-E. ; Zhang, S-L. ; d'Heurle, F. M. ; Petersson, C. S.
出版情報:
Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.111-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Clevenger, L. A. ; Arcot, B. ; Ziegler, W. ; Colgan, E. G. ; Hong, Q. Z. ; d'Heurle, F. M. ; Cabral, C., Jr. ; Gallo, T. A. ; Harper, J. M. E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.133-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.3-, 1996. Pittsburgh. MRS - Materials Research Society
Aldrich, D. B. ; d'Heurle, F. M. ; Sayers, D. E. ; Nemanich, R. J.
出版情報:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.21-, 1996. Pittsburgh. MRS - Materials Research Society
Harper, J. M. E. ; Charai, A. ; Stolt, L. ; d'Heurle, F. M. ; Fryer, P. M.
出版情報:
Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A.. pp.107-112, 1990. Pittsburgh, Pa.. Materials Research Society
Clark, G. J. ; Baglin, J. E. E. ; d'Heurle, F. M. ; White, C. W. ; Farlow, G. ; Narayan, J.
出版情報:
Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.55-60, 1984. New York. North-Holland
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