Liu, S.T. ; Newstrom, K. ; Hibbs-Brenner, M. ; Stokes, R.J. ; Hoefflinger, B. ; Neudeck, G. ; Zingg, R. ; Bousse, L. ; Maindl, J.D.
出版情報:
Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.. pp.169-174, 1985. Pittsburgh, Pa.. Materials Research Society
Rink, I. ; Janssen, A. ; De Veirman, A. ; Zingg, R. ; Lavrijsen, T. ; Schoenmakers, T. ; Boos, P.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.241-250, 2001. Pennington, N.J.. Electrochemical Society
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