Streckfuss, N. ; Frey, L. ; Pichler, P. ; Kuegel, M. ; Zielonka, G. ; Ryssel, H.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.222-231, 1993. Pennington, NJ. Electrochemical Society
Buegler, J. ; Zielonka, G. ; Pfitzner, L. ; Ryssel, H. ; Schottler, M.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.294-307, 2001. Pennington, N.J.. Electrochemical Society
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