Blank Cover Image

Low Temperature Deposition of Metal Oxide Thin Films in Supercritical Carbon Dioxide using Metal-organic Precursors

著者名:
掲載資料名:
Organic/inorganic hybrid materials-2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1007
発行年:
2008
開始ページ:
307
終了ページ:
312
総ページ数:
6
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558999671 [1558999671]
言語:
英語
請求記号:
M23500/1007
資料種別:
国際会議録

類似資料:

1 国際会議録 Atomic Layer Deposition of Metal Oxide Films on GaAs (100) surfaces

Theodosia Gougousi, Justin C. Hackley, John W. Lacis, John Demaree

Materials Research Society
7 国際会議録 Interface Quality and Electrical Performance of Low-Temperature Metal Organic Chemical Vapor Deposition Aluminum Oxide Thin Films for Advanced CMOS Gate …

Skordas, Spyridon, Papadatos, Filippos, Consiglio, Steven, Eisenbraun, Eric, Kaloyeros, Alain

Materials Research Society
2 国際会議録 562c. Deposition Of Conformal Metal Oxide Films In Supercritical Carbon Dioxide

Eunyoung You, Adam O'Neil, James J. Watkins

American Institute of Chemical Engineers
8 国際会議録 Chemical Fluid Deposition of Hf-Zr-O-based Thin Films using Supercritical Carbon Dioxide Fluid

Marina Shiokawa, Katsushi Izaki, Hiroshi Funakubo, Hiroshi Uchida

Materials Research Society
3 国際会議録 Low Temperature Deposition of Polycrystalline Lithium Transition Metal Oxide Thin Films for Micro Batteries

K. Chiu, C. Chen, P. Chen, W. Ho

Electrochemical Society
9 国際会議録 THIN FILM DEPOSITION BY SOL-GEL AND CVD PROCESSING OF METAL-ORGANIC PRECURSORS

Mathur, S.

Kluwer Academic Publishers
4 国際会議録 Low Temperature Metal Organic Chemical Vapor Deposition Of Aluminum Oxide Thin Films For Advanced CMOS Gate Dielectric Applications

Skordas, Spyridon, Papadatos, Filippos, Patel, Zubin, Nuesca, Guillermo, Eisenbraun, Eric, Gusev, Evgeni, Kaloyeros, …

Materials Research Society
10 国際会議録 Study of Microstructure and Gas Sensing Properties of Tin Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition

Lee, Sang Woo, Liu, Donhang, Tsai, Ping P., Chen, Haydn

MRS - Materials Research Society
5 国際会議録 Metal-organic chemical vapor deposition of metal oxides: From precursor synthesis to thin films

Belot, J. A., Wang, A., Edleman, N. L., Babcock, J. R., Metz, M. V., Marks, T. J., Markworth, P. R., Chang, R. P. H.

MRS-Materials Research Society
11 国際会議録 LOW-TEMPERATURE DEPOSITION OF ZrC THIN FILMS FROM A SINGLE-SOURCE PRECURSOR

Smith, David C., Rubiano, Rodrigo R., Healy, Matthew D., Springer, Robert W.

Materials Research Society
6 国際会議録 Carbon-Free Cr Metal Thin Films Deposition at Low Temperature by MOCVD

Maury, F., Gueroudji, L., Vahlas, C., Abisset, S., Pelletier, L.

Electrochemical Society
12 国際会議録 Low-Temperature Deposition of ZrC Thin Films from a Single-Source Precursor

Smith, D.C., Healy, M.D., Rubiano, R.R., Springer, R.W.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12