Comparative Studies of TMAH and KOH for Anisotropic Etching of Silicon
- 著者名:
- Zavracky, P.M.
- 掲載資料名:
- Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-5
- 発行年:
- 1997
- 開始ページ:
- 102
- 終了ページ:
- 117
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771320 [1566771323]
- 言語:
- 英語
- 請求記号:
- E23400/970514
- 資料種別:
- 国際会議録
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