Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.451-461, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.324-330, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.340-345, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings. pp.852-855, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.369-375, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings. pp.514-517, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Electrochemistry of conductive polymers : proceedings of the Second International School in Sulejów, Poland held September 10-16, 1988. pp.29-38, 1989. Aedermannsdorf, Switzerland. Trans Tech Publications
EPDIC 3 : proceedings of the Third European Powder Diffraction Conference, held September 25 - 28, 1993, in Vienna, Austria. Part1 pp.57-62, 1994. Aedermannsdorf, Switzerland. Trans Tech Publications
Photomask and Next-Generation Lithography Mask Technology VIII. pp.221-227, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering