1.

国際会議録
国際会議録
1. In Situ Measurement of Viscous Flow of Thermal Silicon Dioxide Thin Films at High Temperature
Yu, Chia-Liang ; Flinn, Paul A. ; Bravman, John C.
出版情報: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.261-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 446
2.

国際会議録
国際会議録
2. In Situ Stress Measurements During Dry Oxidation of Silicon
Yu, Chia-Liang ; Flinn, Paul A. ; Bravman, John C.
出版情報: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.95-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 473
3.

国際会議録
国際会議録
3. Stress and Microstructural Evolution of LPCVD Polysilicon Thin Films During High-Temperature Annealing
Yu, Chia-Liang ; Flinn, Paul A. ; Lee, Seok-Hee ; Bravman, John C.
出版情報: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.403-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 441