Development of an RTA Process for the Enhanced Crystallization of Amorphous Silicon Thin Films
- 著者名:
Yoon, Y.-G. Kim, T.-K. Kim, K.-B. .Choi, J.-Y Lee, B.-I Joo, S.-K. - 掲載資料名:
- Rapid thermal and other short-time processing technologies : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-9
- 発行年:
- 2000
- 開始ページ:
- 337
- 終了ページ:
- 344
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772747 [1566772745]
- 言語:
- 英語
- 請求記号:
- E23400/2000-9
- 資料種別:
- 国際会議録
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