1.

国際会議録
国際会議録
1. Mechanism of Surface Roughness in Hydrogen Plasma Cleaned <100> Silicon at Low Temperatures
Hwang, K-H. ; Yoon, E. ; Whang, K-W. ; Lee, J.Y.
出版情報: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.576-585,  1996.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 96-12
2.

国際会議録
国際会議録
2. High-Quality Microcrystalline Silicon-Carbide Films Prepared by Photo-CVD Method Using Ethylene Gas as a Carbon Source
Lee, H. K. ; Lim, K. S. ; Myong, S. Y. ; Yoon, E.
出版情報: Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A..  pp.603-608,  1999.  Warrendale.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 557
3.

国際会議録
国際会議録
3. GROWTH AND CHARACTERIZATION OF EPITAXIAL GaAs DEPOSITED BY PLASMA-ENCHANCED METAL-ORGANIC CHEMICAL VAPOR DEPOSITION
Huelsman, A. D. ; Yoon, E. ; Reif, R.
出版情報: Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.235-242,  1987.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 98
4.

国際会議録
国際会議録
4. Enhanced Two Dimensional Growth of Low Temperature GaN Buffer Layers by N2 Plasma Pretreatment of Sapphire Substrates
Kim, M.H. ; Sone, C. ; Yi, T.H. ; Yoon, E.
出版情報: Proceedings of the Second Symposium on III-V Nitride Materials and Processes.  pp.25-32,  1997.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 97-34
5.

国際会議録
国際会議録
5. HYDROGEN PLASMA CLEANING OF OXIDE PAlTERNED Si WAFERS FOR LOW TEMEPARATURE Si EPITAXY
Yuh, H.-K. ; Park, J.-W. ; Hwang, K.-H. ; Yoon, E. ; Whang, K.-W.
出版情報: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.307-314,  1997.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 97-35
6.

国際会議録
国際会議録
6. Amorphous Semiconductor Sample Preparation for Transmission EXAFS Measurements
Ridgway, M. C. ; Glover, C. J. ; Tan, H. H. ; Clark, A. ; Karouta, F. ; Foran, G. J. ; Lee, T. W. ; Moon, Y. ; Yoon, E. ; Hansen, J. L. ; Nylandsted-Larsen, A. ; Clerc, C. ; Chaumont, J.
出版情報: Applications of synchrotron radiation techniques to materials science IV : sympoisum held April 13-17, 1998, San Francisco, California, U.S.A..  pp.309-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 524
7.

国際会議録
国際会議録
7. Impact of water and top-coats on lithographic performance in 193-nm immersion lithography
Hiroi, Y. ; Kishioka, T. ; Sakamoto, R. ; Maruyama, D. ; Sakaida, Y. ; Matsumoto, T. ; Nakajima, Y. ; Chon, S. ; Kim, Y. ; Yoon, S. ; Han, S. ; Yoon, E.
出版情報: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.20-30,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5753(1)
8.

国際会議録
国際会議録
8. A TITANIUM SALICIDE PROCESS SUITABLE FOR SUBMICRON CMOS APPLICATIONS
Blair, C. ; Demirlioglu, E. ; Yoon, E. ; Pierce, J.
出版情報: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.53-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 320
9.

国際会議録
国際会議録
9. Low-Temperature Photoluminescence Properties of In Situ Zn-Doped InP Layers Grown by LP-MOCVD
Moon, Y. B. ; Si, S. K. ; Yoon, E. ; Kim, S. J.
出版情報: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.535-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 442
10.

国際会議録
国際会議録
10. Growth of GaN Films on Porous 4H-SiC Substrate by Metal-Organic Chemical Vapor Deposition
Jeong, J.K. ; Song, H.K. ; Um, M.Y. ; Kim, H.J. ; Seo, H.C. ; Yoon, E. ; Hwang, C.S.
出版情報: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.1597-1600,  2004.  Uetikon-Zuerich.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 457-460