1.

国際会議録
国際会議録
1. INVESTIGATION OF OXIDE/METAL MULTILAYERS FOR SOFT X-RAY OPTICS FABRICATED BY ION BEAM SPUTTERING
Kataoka, I. ; Yonemitsu, T. ; Sekine, K. ; Yamada, I. ; Etoh, K. ; Ito, K. ; Hoshi, N.
出版情報: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.335-340,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 157
2.

国際会議録
国際会議録
2. THE EFFECTS OF ION ENERGY ON CARBON AND TUNGSTEN FILMS FABRICATED BY DIRECT ION BEAM DEPOSITION AND ION BEAM SPUTTERING DEPOSITION
Kataoka, I. ; Ito, K. ; Hoshi, N. ; Yonemitsu, T. ; Etoh, K. ; Yamada, I. ; Delaunay, Jean-Jacques
出版情報: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.359-364,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 223