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出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.31-38, 2003. Pennington, NJ. Electrochemical Society
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出版情報:
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.4245-4250, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications