Mahorowala, A. ; Halle, S. ; Gabor, A. ; Chu, W. ; Barberet, A. ; Samuels, D. ; Abdo, A. ; Tsou, L. ; Yan, W. ; Iseda, S. ; Patel K ; Dirahoui, B ; Nomura, A ; Ahsan, I ; Azam, F ; Berg, G ; Brendler, A ; Zimmerman, J ; Faure, T
出版情報:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Goebel, K. F. ; Yan, W. ; Eklund, N. H. W. ; Hu, X. ; Avasarala, V. ; Celaya, J.
出版情報:
Smart structures and materials 2006 : Smart sensor monitoring systems and applications : 27 February-1 March 2006, San Diego, California, USA. pp.61671O-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Wallow, T. I. ; Brock, P. J. ; DiPietro, R. A. ; Allen, R. D. ; Opitz, J. ; Sooriyakumaran, R. ; Hofer, D. C. ; Mewherter, A. M. ; Cui, Y. ; Yan, W. ; Worth, G. ; Moreau, W. M. ; Meute, J. ; Byers, J. D. ; Rich, G. K. ; McCallum, M. ; Jayaraman, S. ; Vicari, R. ; Cagle, J. ; Sun, S. ; Hullihen, K. A.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.26-35, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1209-1214, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
ICO20 : lasers and laser technologies : 21-26 August, 2005, Changchun, China. pp.60281M-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Fourth International Conference on Virtual Reality and Its Applications in Industry : 23-25 October 2003, Tianjin, China. pp.111-116, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium. pp.322-327, 1999. Pennington, NJ. Electrochemical Society
Component and systems diagnostics, prognostics, and health management II : 3-4 April, 2002, Orlando, USA. pp.88-97, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
High-Temperature ordered intermetallic alloys VII : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.343-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society