Yamada, I. ; Toyada, N. ; Matsuo, J. ; Allen, L. P.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.51-60, 2003. Pennington, NJ. Electrochemical Society
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.513-518, 1989. Pittsburgh, Pa.. Materials Research Society
Wada, S. ; Current, M. I. ; Takaoka, G. H. ; Usui, H. ; Yamada, I.
出版情報:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.621-626, 1992. Pittsburgh, Pa.. Materials Research Society
Yamada, I. ; Yamada, T. ; Takaoka, G. H. ; Usui, H. ; Current, M. I.
出版情報:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.597-608, 1992. Pittsburgh, Pa.. Materials Research Society
Clusters and cluster-assembled materials : symposium held November 26-30, 1990, Boston, Massachusetts, U.S.A.. pp.383-390, 1991. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.195-200, 1988. Pittsburgh, Pa.. Materials Research Society
Kataoka, I. ; Ito, K. ; Hoshi, N. ; Yonemitsu, T. ; Etoh, K. ; Yamada, I. ; Delaunay, Jean-Jacques
出版情報:
Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.. pp.359-364, 1991. Pittsburgh, Pa.. Materials Research Society
Yamada, I. ; Levenson,. L. L. ; Usui, H. ; takagi, T.
出版情報:
Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.253-258, 1987. Pittsburgh, Pa.. Materials Research Society
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