Bhat, M. ; Yoon, G.W. ; Kim, J. ; Han, L,K. ; Yan, J. ; Wristers, D. ; Kwong, D.L.
出版情報:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.317-327, 1994. Pennington, NJ. Electrochemical Society
Han, L. K. ; Bhat, M. ; Yan, J. ; Wristers, D. ; Kwong, D. L.
出版情報:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.221-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Chen, Y. Y. ; Gardner, M. ; Fulford, J. ; Wristers, D. ; Joshi, A. B. ; Kwong, D. L.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.283-, 1999. Warrendale, PA. MRS - Materials Research Society
Wristers, D. ; Wang, H.H. ; Han, L.K. ; Lin, C. ; Chen, T.S. ; Kwong, D.L. ; Fulford, J.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.733-743, 1996. Pennington, NJ. Electrochemical Society
Kim, B.Y. ; Han, L.K. ; Wristers, D. ; Fulford, J. ; Kwong, D.-L.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.722-732, 1996. Pennington, NJ. Electrochemical Society
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