1.

国際会議録
国際会議録
1. Development of Silicon Nitride Films for Gate Dielectric Applications
Brady, D. ; Watt, V.H.C. ; Karamcheti, A. ; Vishnubhotla, L. ; Bersuker, G. ; Kim, S. ; Zietzoff, P. ; Gilmer, M. ; Guan, J. ; Torres, K. ; Nguyen, B. ; Williamson, G. ; Brown, G. ; Gale, G. ; Jackson, M. ; Huff, H.R.
出版情報: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.207-218,  1999.  Pennington, New Jersey.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-6
2.

国際会議録
国際会議録
2. Experimental Observations of the Redistribution of Implanted Nitrogen at the Si-SiO2 Interface During RTA Processing
Lysaght, P. S. ; Nguyen, B. ; Bennett, J. ; Williamson, G. ; Torres, K. ; Gilmer, M. ; Luo, T-Y. ; Brady, D. ; Guan, J. ; Brown, G. A. ; Zeitzoff, P. ; Bersuker, G. ; Mucha, J. ; Geyling, F. ; Gebera, G. ; Vishnubhotla, L. ; Jackson, M. D. ; Huff, H. R.
出版情報: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.283-,  1999.  Warrendale, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 568
3.

国際会議録
国際会議録
3. Process and Manufacturing Challenges for High-K Gate Stack Systems
Gilmer, M. C. ; Luo, T-Y. ; Huff, H. R. ; Jackson, M. D. ; Kim, S. ; Bersuker, G. ; Zeitzoff, P. ; Vishnubhotla, L. ; Brown, G. A. ; Amos, R. ; Brady, D. ; Watt, V. H. C. ; Gale, G. ; Guan, J. ; Nguyen, B. ; Williamson, G. ; Lysaght, P. ; Torres, K. ; Geyling, F. ; Gondran, C. F. H.
出版情報: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.323-,  1999.  Warrendale, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 567
4.

国際会議録
国際会議録
4. Temperature Dependent Emissivity on Multilayers of Silicon
Abedrabbo, S. ; Ravindra, N. M. ; Chen, W. ; Rajasekhar, V. ; Golota, T. ; Gokce, O. H. ; Nguyenphu, A. T. Fiory B. ; Nanda, A. ; Speranza, T. ; Maszara, W. ; Williamson, G.
出版情報: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.69-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 470