Wickramanayaka, S. ; Miura, V. ; Nagakawa, V. ; Saga, V. ; Numasawa, V.
出版情報:
Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium. pp.18-26, 1999. Pennington, NJ. Electrochemical Society
Sano, K. ; Tamamaki, H. ; Nomura, M. ; Wickramanayaka, S. ; Nakanishi, Y. ; Hatanaka, Y.
出版情報:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.539-, 1996. Pittsburgh. MRS - Materials Research Society
Wickramanayaka, S. ; Kitamura, K. ; Nakanishi, Y. ; Hatanaka, Y.
出版情報:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.145-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Wickramanayaka, S. ; Kitamura, K. ; Nakanishi, Y. ; Hatanaka, Y.
出版情報:
Advanced laser processing of materials - fundamentals and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.429-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Sano, K. ; Tamamaki, H. ; Nomura, M. ; Wickramanayaka, S. ; Nakanishi, Y. ; Hatanaka, Y.
出版情報:
Microwave processing of materials V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.647-, 1996. Pittsburgh,, PA. MRS - Materials Research Society
Wickramanayaka, S. ; Nagahama, H. ; Watanabe, E. ; Hayashi, T. ; Sato, M. ; Nakagawa, Y. ; Hasegawa, S. ; Mizuno, S. ; Numasawa, Y.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D6.3-, 2001. Warrendale, PA. Materials Research Society