Demonstration of a Y-Branch Switch in Deeply Reactive Ion Etched In0.53Ga0.47As/InP with In-Plane Gates
- 著者名:
- 掲載資料名:
- Proceedings of the Fourth International Symposium on Quantum Confinement : nanoscale materials, devices, and systems
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-11
- 発行年:
- 1997
- 開始ページ:
- 221
- 終了ページ:
- 230
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771382 [1566771382]
- 言語:
- 英語
- 請求記号:
- E23400/97-11
- 資料種別:
- 国際会議録
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