Ion-Cut Silicon Layer Transfer with Patterned Implantation of Hydrogen
- 著者名:
Yun, C H ( (University of California, Berkeley) ) Wengrow, A B ( (University of California, Berkeley) ) Cheung, NW ( (University of California, Berkeley) ) Zheng, Y ( (University of California, San Diego) ) Welty, R J ( (University of California, San Diego) ) Guan, Z F ( (University of California, San Diego) ) Smith, K V ( (University of California, San Diego) ) Asbeck, PM ( (University of California, San Diego) ) Yu, E T ( (University of California, San Diego) ) Lau, S S ( (University of California, San Diego) ) - 掲載資料名:
- Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-3
- 発行年:
- 1999
- 開始ページ:
- 125
- 終了ページ:
- 130
- 総ページ数:
- 6
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772259 [1566772257]
- 言語:
- 英語
- 請求記号:
- E23400/99-3
- 資料種別:
- 国際会議録
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