Wager, J.F. ; Lim, S. ; Ryu, J.H. ; Marlia, J. ; Remley, K. ; Lite, K. ; Plant, T.K. ; Weisshaar, A. ; Casas, L.M.
出版情報:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.187-197, 1994. Pennington, NJ. Electrochemical Society