1.

国際会議録
国際会議録
1. New variable-transmission illumination technique optimized with design rule criteria
Cirelli,R.A. ; Mkrtchyan,M.M. ; Watson,G.P. ; Trimble,L.E. ; Weber,G.R. ; Windt,D.L. ; Nalamasu,O.
出版情報: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.395-405,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3334
2.

国際会議録
国際会議録
2. Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
Kizilyalli,I.C. ; Abein,G. ; Chen,Z. ; Weber,G.R. ; Register,F. ; Harris,E. ; Chetlur,S. ; Higashi,G.S. ; Schofieled,M. ; Sen,S. ; Kotzias,B. ; Roy,P.K. ; Lyding,J.W. ; Hess,K.
出版情報: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.141-146,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3506