1.

国際会議録
国際会議録
1. Tool ranking using aberration measurements in a high-volume manufacturing facility
Garza, C.M. ; Warrick, S.P. ; Seligman, G.S. ; Zavyalova, L.V. ; Zwol, A. ; Foster, J.
出版情報: Optical Microlithography XVI.  Part Three  pp.1432-1440,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5040
2.

国際会議録
国際会議録
2. Integration of new alignment mark designs in dual inlaid-copper interconnect processes
Warrick, S.P. ; Hinnen, P.C. ; van Haren, R.J. ; Smith, C.J. ; Megens, H.J. ; Fu, C.-C.
出版情報: Optical Microlithography XV.  Part Two  pp.971-980,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4691