Schmolke, R. ; Passek, F. ; Gerber, H.-A. ; Lambert, U. ; Puppe, G. ; Piontek, H. ; Wagner, P.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.448-457, 1997. Pennington, NJ. Electrochemical Society
Passek, F. ; Schmolke, R. ; Lambert, U. ; Puppe, G. ; Wagner, P.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.438-447, 1997. Pennington, NJ. Electrochemical Society
Trauwaert, M.-A. ; Kenis, K. ; Caymax, M. ; Mertens, P.W. ; Heyns, M.M. ; Vanhellemont, J. ; Graf, D. ; Wagner, P.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.455-462, 1997. Pennington, NJ. Electrochemical Society
Kissinger, G. ; Vanhellemont, J. ; Lambert, U. ; Dornberger, E. ; Sorge, R. ; Morgenstern, G. ; Grabolla, T. ; Graef, D. ; von Ammon, W. ; Wagner, P. ; Richter, H.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1095-1112, 1998. Pennington, NJ. Electrochemical Society
Ammon, W.v. ; Ehlert, A. ; Lambert, U. ; Graef, D. ; Brohl, M. ; Wagner, P.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.136-147, 1994. Pennington, NJ. Electrochemical Society
Graef, D. ; Wahlich, R. ; Krottenthaler, P. ; Feijoo, D. ; Lambert, U ; Wagner, P.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.18-31, 1997. Pennington, NJ. Electrochemical Society
Kissinger, G. ; Morgenstern, G. ; Richter, H. ; Vanhellemont, J. ; Graef, D. ; Lambert, U. ; von Ammon, W. ; Wagner, P.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.32-39, 1997. Pennington, NJ. Electrochemical Society
Wenmackers, S. ; Christiaens, P. ; Deferme, W. ; Daenen, M. ; Haenen, K. ; Nesladek, M. ; Wagner, P. ; Vermeeren, V. ; Michiels, L. ; vandeVen, M. ; Ameloot, M. ; Wouters, J. ; Naelaerts, L. ; Mekhalif, Z.
出版情報:
Functionally graded materials VIII : proceedings of the 8th International Symposium on Multifunctional and Functionally Graded Materials (FGM2004) : held in Leuven, Belgium, 11-14 July 2004. pp.267-272, 2005. Switzerland. Trans Tech Publications