A. Dimoulas ; M. Houssa ; A. Ritenour ; J. Fompeyrine ; W. Tsai ; J. Seo ; Y. Panayiotatos ; P. Tsipas ; D. P. Brunco ; M. R. Caymax ; J. Locquet ; C. Dieker
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment. pp.371-384, 2006. Pennington, NJ. Electrochemical Society