Kolawa, E. ; Halperin, L. ; Pokela, P. ; Vu, Quat T. ; Nieh, C. W.
出版情報:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.33-40, 1990. Pittsburgh, Pa.. Materials Research Society
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.531-536, 1990. Pittsburgh, Pa.. Materials Research Society
Raud, S. ; Vu, Quat T. ; Nicolet, M. -A. ; Pollock, G. A. ; Mitchell, K. W. ; Leavitt, K. W. ; Ashbaugh, M. D. ; McIntyre, L. C.
出版情報:
Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A.. pp.101-106, 1990. Pittsburgh, Pa.. Materials Research Society